Ceramic meso hot-plates for gas sensors

Titelangaben

Rettig, Frank ; Moos, Ralf:
Ceramic meso hot-plates for gas sensors.
In: Sensors and Actuators B: Chemical. Bd. 103 (2004) Heft 1-2 . - S. 91-97.
ISSN 0925-4005
DOI: https://doi.org/10.1016/j.snb.2004.04.040

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Abstract

A new type of gas sensor is presented that combines the advantages of micro machined silicon gas sensors and ceramic gas sensors. Low temperature co-fired ceramics (LTCC)-technology, which is the cutting edge for manufacturing high density integrable circuits for high frequency applications, is used to manufacture gas sensors. The sensor devices are shaped like already known hot-plate low-power micro machined silicon gas sensors. Compared to classical ceramic gas sensors the low thermal conductivity (3 W/mK) leads to a low power consumption (480 mW at 330 °C). The inexpensive manufacturing technology is a remarkable advantage for small series compared to the expensive silicon technology. This contribution presents first results for LTCC hot-plate gas sensors that include design, manufacturing, tests and simulation of such devices. Important thermal properties like power consumption and temperature distribution are measured and compared to FEM-simulations. The results of the simulations are used to improve the temperature distribution on the hot-plate. First measurements using a propane sensitive Cr2O3 layer show the principal operativeness of the concept using LTCC meso hot-plates for gas sensors.