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Cylindrical LTCC Substrates for Gas Sensors : First Steps

Title data

Kita, Jaroslaw ; Leweling, Florian ; Moos, Ralf:
Cylindrical LTCC Substrates for Gas Sensors : First Steps.
Event: 35th International Microelectronics and Packaging IMAPS Conference , 21. - 24.09.2011 , Gdansk, Poland.
(Conference item: Conference , Other Presentation type)

Abstract in another language

The usage of cylindrical substrates for gas sensor applications is well known. Such sensor consists of alumina tubes with screen-printed electrodes and gas sensitive layers on the outside. A platinum wire inside the ceramic tube works as a heater. This simple design can be improved using Low Temperature Co-fired Ceramics (LTCC). Application of LTCC allows manufacturing of small compact gas sensors with low power consumption. Moreover, LTCC allows integrating three-dimensional functions in ceramic body. This improves stability and sensitivity of the sensors. In this contribution, the feasibility to design and manufacture cylindrical gas sensor substrates in LTCC technology is shown. The technological process steps as well as the influence of process parameters (lamination, firing conditions) and their influence on structure quality are discussed.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 19 May 2015 09:03
Last Modified: 13 Apr 2016 07:16