at Google ScholarTitle data
Meiss, Sebastian A. ; Rohnke, Marcus ; Rettig, Frank ; Moos, Ralf ; Janek, Jürgen:
Ion-Conducting Probes for Low Temperature Plasmas.
2007
Event: 6. Doktoranden-Workshop Physikalische Festkörperchemie
, 08.-09.Okt.2007
, Braunschweig, Germany.
(Conference item: Workshop
,
Other
Presentation type)
Abstract in another language
Yttria stabilized zirconia (YSZ) is a ceramic material that shows a very high ionic conductivity at elevated temperatures, with O2− being the mobile species. Since its electronic partial conductivity is negligibly small, YSZ can be used for the construction of purely ion-conducting plasma probes. The electrochemical processes taking place at the so-called triple phase boundary (TPB), where YSZ, an electron providing or accepting metal electrode and the gaseous phase containing oxygen meet, are studied well. Such processes include adsorption, dissociation and surface diffusion of oxygen species and charge transfer processes to reduce neutral oxygen to O2−. As oxygen plasmas provide and accept electrons and also dissociated and partially reduced oxygen from the gaseous phase to the YSZ|plasma interface5, the TPB is reduced to a two phase boundary at such an interface, maximizing the reactive area. Here we present the concept and design of such an ion-conducting probe, with an integrated heating system and a rectangular YSZ tip. IV-characteristics measured with single- and double-probe setups in a capacitive radio frequency discharge of various, oxygen containing gas compositions are presented. Their evaluation is compared to values obtained with traditional, purely electron conducting probes.
Further data
| Item Type: | Conference item (Other) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 08 Jun 2015 06:49 |
| Last Modified: | 18 Apr 2018 02:48 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/14836 |