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Ion-Conducting Probes for Low Temperature Plasmas

Title data

Meiss, Sebastian A. ; Rohnke, Marcus ; Rettig, Frank ; Moos, Ralf ; Janek, Jürgen:
Ion-Conducting Probes for Low Temperature Plasmas.
Event: 7th International Workshop on Electrical Probes in Magnetized Plasmas , 22.-25.07.2007 , Prague, Czech Republic.
(Conference item: Workshop , Other Presentation type)

Abstract in another language

Yttria stabilized zirconia (YSZ) is a ceramic material with a melting point of ca. 3000 K. It shows a very high ionic conductivity at elevated temperatures, with twice negatively charged oxygen ions being the mobile species. Since its electronic partial conductivity is negligibly small, YSZ can be used for the construction of purely ion-conducting probes. The electrochemical processes taking place at the so-called triple phase boundary (TPB), where YSZ, an electron providing or accepting metal electrode and the gaseous phase containing oxygen meet, are studied well. Such processes include adsorption, dissociation and surface diffusion of oxygen species and charge transfer processes to reduce neutral oxygen to the oxygen anions that are mobile in YSZ. As an oxygen plasma can provide and accept electrons and also dissociated and partially reduced oxygen from the gaseous phase to the YSZ plasma interface, the TPB is reduced to a two phase boundary at such an interface, maximizing the reactive area. When employing a probe consisting of YSZ to an oxygen plasma, one expects to gather information beyond those that one can obtain with a purely electron conducting probe. The IV-characteristics should show a dependence on the concentration of various oxygen species in the plasma. Here we present the concept and design of such an ion-conducting probe, with an integrated heating system and a rectangular tip consisting of YSZ. First IV-characteristics measured with a single-probe setup in a capacitive RF discharge of various oxygen/nitrogen gas compositions are presented and compared to those of a platinum probe with comparable geometry, as a proof of principle.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 08 Jun 2015 07:07
Last Modified: 18 Apr 2018 02:48