Ion-conducting electrodes and probes for low temperature plasmas

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Meiss, Sebastian A. ; Steinmüller, S. O. ; Rohnke, Marcus ; Rettig, Frank ; Moos, Ralf ; Janek, Jürgen:
Ion-conducting electrodes and probes for low temperature plasmas.
2007
Event: 28th International Conference on Phenomena in Ionized Gases ICPIG , 15.-20.07.2007 , Prague, Czech Republic.
(Conference item: Conference , Other Presentation type)

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Electrodes interacting with a low temperature plasma are typically built of electron conducting materials, mostly metals. There exist a number of solid (and liquid) materials that show a negligibly electronic partial conductivity, but show a good overall conductivity due to their high ionic partial conductivity. The processes at an ionic-conductor|metal interface are a very active field of research, but little is known about the use of such materials as electrodes in a low temperature plasma. Here we discuss the ionic-conductor|plasma interface both in general and in detail on the basis of experiments on yttria-stabilized zirconia as material for electrodes in a direct current discharge and for ion conducting Langmuir probes.