at Google ScholarTitle data
Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf:
Integration of Fired Ceramics on LTCC Structures - Feasibility Study.
2006
Event: 4th European Microelectronics and Packaging Symposium
, 21.-24.05.2006
, Terme Catez, Slovenia.
(Conference item: Conference
,
Other
Presentation type)
Abstract in another language
Zero-shrinkage LTCC tapes allow to manufacture LTCC microsystems that include an integrated sintered ceramic component without an additional firing step. In previous papers, it has been shown that green zero-shrinkage LTCC tapes can be joined with conventional 96% alumina ceramics by applying a ceramic binder, laminating the compound, and co-firing all together. In this contribution the feasibility of joining different ceramic composites as well as borosilicate glass with zero shrinkage LTCC tapes is demonstrated. The technological process steps as well as the influence of process parameters (lamination, firing profiles) and their influence on structure quality are discussed. Results of SEM microstructure analyses of LTCC ceramics and solid components in dependence of firing conditions are shown.
Further data
| Item Type: | Conference item (Other) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 17 Jun 2015 07:15 |
| Last Modified: | 06 Apr 2016 06:43 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/14981 |