at Google ScholarTitle data
Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf:
A Novel Method of Fabrication of Mixed LTCC-Solid Ceramic Systems.
2005
Event: European Microelectronics and Packaging Conference EMPC 2005
, 12.-15.06.2005
, Brugge, Belgien.
(Conference item: Conference
,
No information
)
Abstract in another language
Low Temperature Co-fired Ceramics Technology (LTCC) is an appropriate way to integrate three-dimensional functions in microsystems. The shrinkage of LTCC in x-y direction limits the combination of LTCC with materials or elements that have different shrinkage behavior (or that do not shrink at all during firing). Usually, such elements are added by an additional post-firing process to the LTCC structures. The recently introduced zero-shrinkage LTCC tapes can eliminate the barrier in construction of LTCC microsystems with additional non- LTCC components. This work addresses a method of fabrication zero-shrinkage LTCC tapes with conventional 96% alumina substrates as an example of mixed LTCC solid ceramic systems. In contrast to other methods, one firing step (characteristic for LTCC) was maintained. The technological process steps as well as the influence of parameters like firing temperature or applied dielectric binder and their influence on structure quality are discussed. Results of SEM microstructure analyses of LTCC ceramics and solid components are shown. In order to show the benefits of the new method, LTCC gas sensor transducers with alumina hot-plates are presented.
Further data
| Item Type: | Conference item (No information) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 16 Jun 2015 08:56 |
| Last Modified: | 13 Nov 2015 10:16 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/15002 |