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Hot-Plate Gas Sensors – are Ceramics Better?

Title data

Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf ; Drüe, Karl-Heinz ; Thust, Heiko:
Hot-Plate Gas Sensors – are Ceramics Better?
Event: 1st IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2005) , 10.-13.04.2005 , Baltimore, Maryland, USA.
(Conference item: Conference , Other Presentation type)

Abstract in another language

For modern gas sensors low power consumption is expected. It is well-known that with low temperature cofiring technology (LTCC) small compact sensors can be constructed. Compared with standard devices on alumina such sensors consume less power due to their lower thermal conductivity. However, simple replacement of substrate materials is not sufficient. LTCC offers the possibility to structure unfired tapes easily. Therefore, the sensor substrate may have almost any desired shape. In our first investigations we showed that ceramic hot-plates can be successfully constructed in LTCC technology. In contrast to standard configuration of thick-film gas sensors on alumina or even on LTCC, the hot-plate principle allows to reduce significantly power consumption. Our tests showed possibilities to further decrease power consumption by laser forming of suspended beams. The obtained results were very promising and induced continuation of these works. This paper shows recent results of investigations on hot-plate structures. Tapes from different manufacturers have been used for sensor construction. The sensors were made by laser structuring of printed unfired LTCC tapes. Samples were evaluated by measurement and analysis of electrical properties as well as by long term tests of integrated heaters. Design issues as well as stability issues are discussed in this contribution.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 16 Jun 2015 09:42
Last Modified: 05 Apr 2016 07:09