at Google ScholarTitle data
Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf ; Drüe, Karl-Heinz ; Thust, Heiko:
Hot-Plate Gas Sensors – are Ceramics Better?
2005
Event: 1st IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2005)
, 10.-13.04.2005
, Baltimore, Maryland, USA.
(Conference item: Conference
,
Other
Presentation type)
Abstract in another language
For modern gas sensors low power consumption is expected. It is well-known that with low temperature cofiring technology (LTCC) small compact sensors can be constructed. Compared with standard devices on alumina such sensors consume less power due to their lower thermal conductivity. However, simple replacement of substrate materials is not sufficient. LTCC offers the possibility to structure unfired tapes easily. Therefore, the sensor substrate may have almost any desired shape. In our first investigations we showed that ceramic hot-plates can be successfully constructed in LTCC technology. In contrast to standard configuration of thick-film gas sensors on alumina or even on LTCC, the hot-plate principle allows to reduce significantly power consumption. Our tests showed possibilities to further decrease power consumption by laser forming of suspended beams. The obtained results were very promising and induced continuation of these works. This paper shows recent results of investigations on hot-plate structures. Tapes from different manufacturers have been used for sensor construction. The sensors were made by laser structuring of printed unfired LTCC tapes. Samples were evaluated by measurement and analysis of electrical properties as well as by long term tests of integrated heaters. Design issues as well as stability issues are discussed in this contribution.
Further data
| Item Type: | Conference item (Other) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 16 Jun 2015 09:42 |
| Last Modified: | 05 Apr 2016 07:09 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/15010 |