at Google ScholarTitle data
Schubert, Michael ; Exner, Jörg ; Stöcker, Thomas ; Hanft, Dominik ; Moos, Ralf:
Effect of annealing on the permittivity of ceramic films manufactured by the
Aerosol Deposition Method.
2016
Event: 91. DKG Jahrestagung mit Symposium Hochleistungskeramik 2016
, 07.-09.03.2016
, Freiberg, Deutschland.
(Conference item: Conference
,
Poster
)
Abstract in another language
The Aerosol deposition Method (ADM) is a novel ceramic coating method, which allows manufacturing dense ceramic films at room temperature directly from ceramic powders without any high temperature sintering steps and without expensive vacuum processes. Due to its deposition mechanism based on collision and densification of fine ceramic powder particles on a substrate it is also called “Room Temperature Impact Consolidation” (RTIC).Ceramic particles are accelerated up to several hundred m/s and ejected on a target. There, they build dense ceramic layers by fraction of the particles into fragments with typical crystallite sizes of about 20 nm. To investigate the influence of the AD process on the relative permittivity, several films with different materials (Al2O3, TiO2, SrTiO3 and PZT) have been deposited covering a wide permittivity spectrum. For this investigation, the materials were sprayed on an interdigital electrode structure. The capacitances of the resulting layer were measured by impedance spectroscopy. With the help of a numerical model that considers the field distributions, the permittivities were calculated. To verify these results, the same materials were sprayed on copper substrates and measured in a plate-capacitor setup. Although the results of the two electrode types were matching, the absolute values of permittivity were lower than the reported bulk material data. Thus a post-deposition annealing process was added. After annealing, all materials (except SrTiO3) showed a permittivity as expected for bulk materials. SrTiO3, however started with a by far low permittivity, which astonishingly decreased even more after annealing.
Further data
| Item Type: | Conference item (Poster) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 14 Mar 2016 09:59 |
| Last Modified: | 18 Apr 2016 07:57 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/31733 |