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Alternative spray-based processing methods for dielectric and piezoelectric film deposition

Title data

Deluca, M. ; Wimmer-Teubenbacher, R. ; Bruckner, Michaela ; Kita, Jaroslaw ; Moos, Ralf ; Reichmann, K. ; Maier, G. A.:
Alternative spray-based processing methods for dielectric and piezoelectric film deposition.
Event: Electronic Materials and Applications 2017 , Jan 18-20, 2017 , Orlando, Florida, USA.
(Conference item: Conference , Speech )

Abstract in another language

Ferroelectric thin and thick films are widely used for energy harvesting and energy storage applications. Processing methods like sputtering, physical/chemical vapor deposition or chemical solution deposition (CSD) are generally used, whereby the latter has the advantage of lower cost and high flexibility with respect to the achievable range of microstructure, composition and properties. CSD methods, however, require repetition of deposition-pyrolysis-crystallization cycles to achieve desired thicknesses up to and above 1 µm. In this work, we explore the possibilities offered by two alternative deposition methods: Aerosol deposition, in which a calcined powder is sprayed at high velocity onto a substrate and consolidates upon impact, and spray pyrolysis, a CSD method in which a precursor solution is sprayed on a hot substrate and pyrolyzes on contact. We used these methods to deposit BaTiO3 films on both alumina substrates with Ag-based electrode and full sheet Cu-covered FR4 substrates. Film thicknesses up to 3 µm have been achieved. The structure and morphology of the prepared films were characterized with SEM, XRD and Raman spectroscopy. Furthermore, we characterized the dielectric and ferroelectric properties of the films, in order to clarify the potential of these deposition methods in obtaining properties comparable to those achievable with traditional processing routes.

Further data

Item Type: Conference item (Speech)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 13 Feb 2017 09:52
Last Modified: 13 Feb 2017 09:52