Title data
Schubert, Michael ; Exner, Jörg ; Moos, Ralf:
Influence of Carrier Gas Composition on the Stress of Al2O3 Coatings Prepared by the Aerosol Deposition Method.
In: Materials.
Vol. 7
(2014)
Issue 8
.
- pp. 5633-5642.
ISSN 1996-1944
DOI: https://doi.org/10.3390/ma7085633
Project information
Project title: |
Project's official title Project's id Dichte keramische Schichten ohne Hochtemperaturprozess AZ-1055-12 Open Access Publizieren No information |
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Project financing: |
Bayerische Forschungsstiftung |
Abstract in another language
Al2O3 films were prepared by the aerosol deposition method at room temperature using different carrier gas compositions. The layers were deposited on alumina substrates and the film stress of the layer was calculated by measuring the deformation of the substrate. It was shown that the film stress can be halved by using oxygen instead of nitrogen or helium as the carrier gas. The substrates were annealed at different temperature steps to gain information about the temperature dependence of the reduction of the implemented stress. Total relaxation of the stress can already be achieved at 300 °C. The XRD pattern shows crystallite growth and reduction of microstrain while annealing.
Further data
Item Type: | Article in a journal |
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Refereed: | Yes |
Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
Result of work at the UBT: | Yes |
DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
Date Deposited: | 01 Dec 2014 08:44 |
Last Modified: | 07 Mar 2023 10:03 |
URI: | https://eref.uni-bayreuth.de/id/eprint/3845 |