Annealing of conductive films formed at room temperature by powder Aerosol Deposition to improve their electrical properties

Title data

Exner, Jörg ; Schubert, Michael ; Hanft, Dominik ; Kita, Jaroslaw ; Moos, Ralf:
Annealing of conductive films formed at room temperature by powder Aerosol Deposition to improve their electrical properties.
2018
Event: 42nd International Conference and Expo on Advanced Ceramics and Composites : ICACC18 , 21.-26.01.2018 , Daytona Beach, Fla., USA.
(Conference item: Conference , Speech )

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Functional ceramic films play a key role in a large variety of applications, ranging from sensors and catalysts to components for energy conversion (SOFC) and storage (batteries). Increasing requirements for long-term stability and enhanced electrical properties also create a rising demand for improved coating techniques. Aerosol Deposition (AD) could meet these demands, since it combines several advantages over conventional ceramic coating techniques. The unique feature is the possibility to form dense, nanocrystalline ceramic films directly from the ceramic powder caused by the Room Temperature Impact Consolidation (RTIC) mechanism. Without the need for a heat treatment during or after deposition, mechanical film properties like hardness or wear resistance are comparable to sintered samples. However, electrical properties significantly deteriorate during RTIC, resulting in a strongly reduced conductivity or permittivity. In order to regain bulk electrical properties, a post deposition film treatment is necessary. This can be accomplished by thermal annealing, i.e. by a heat treatment far below typical sintering temperatures. The behavior of several ionic as well as electronic conducting AD films during annealing was investigated and linked to changes within the film morphology and crystal structure.