Influence of Carrier Gas Species on the Room Temperature Powder Aerosol Deposition Process

Title data

Schubert, Michael ; Wang, Rui ; Kita, Jaroslaw ; Moos, Ralf:
Influence of Carrier Gas Species on the Room Temperature Powder Aerosol Deposition Process.
2018
Event: 42nd International Conference and Expo on Advanced Ceramics and Composites : ICACC18 , 21.-26.01.2018 , Daytona Beach, Fla., USA.
(Conference item: Conference , Speech )

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The Aerosol Deposition Method is a novel ceramic coating technique. It allows manufacturing of dense ceramic films at room temperature directly from ceramic powders without any high temperature sintering steps and without expensive vacuum processes. Due to its deposition mechanism based on collision and densification of fine ceramic powder particles on a substrate, it is also called “Room Temperature Impact Consolidation”. Ceramic particles are accelerated up to several hundred m/s and ejected on a target. There, they build dense ceramic layers in the range of 0.5 to 50 μm by fraction of the particles to crystallite sizes of about 20 nm and subsequent consolidation. The carrier gas is the driving force of this process and therefore affects the process. The speed of sound, the viscosity and other properties directly affect the deposition rate, the resulting film quality and functional properties. Previous studies showed that the mechanical stress of the films are reduced by 50% by using O₂ instead of N₂ as carrier gas. In this study, seven different gases (N₂, O₂, Ar, Ne, Kr, CO₂, SF₆) were used to deposit of Al₂O₃-films on three different substrates (stainless steel, glass, Al₂O₃) and the deposition rate was calculated. Furthermore, the mechanical film stress, the permittivity, and the optical transmission were measured. The results correlated with the physical properties of the gases.