Dense films prepared at room temperature directly from the ceramic powder : An overview on the Aerosol Deposition Method (ADM)

Title data

Moos, Ralf ; Kita, Jaroslaw ; Bektas, Murat ; Exner, Jörg ; Glosse, Philipp ; Hanft, Dominik ; Leupold, Nico ; Nazarenus, Tobias ; Nieke, Philipp ; Schubert, Michael ; Schubert, Michaela:
Dense films prepared at room temperature directly from the ceramic powder : An overview on the Aerosol Deposition Method (ADM).
2018
Event: Materials Science and Engineering Congress (MSE) , 26.-28.9.2018 , Darmstadt, Germany.
(Conference item: Conference , Speech )

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Manufacturing of ceramic components or coatings usually requires high sintering temperatures above 1000 °C. Joining of ceramic coatings with lower-melting materials such as metals, glass and polymers is difficult. Furthermore, many functional and structural ceramics can hardly be processed to dense devices without decomposition. This makes it challenging to produce, e.g., electroceramics or microelectronic components. By utilizing the Aerosol Deposition Method (ADM), it is possible to produce dense ceramic coatings completely without any high-temperature process directly from an initial bulk powder on almost any substrate material. For that, a powder aerosol is generated and accelerated to several 100 m/s by a pressure difference through a nozzle. In a vacuum chamber, dense films are formed by shock impaction of the µm-sized particles on the substrate material. Resulting coatings with excellent substrate adhesion can be achieved in a thickness range between 0.5 µm and 300 µm. The stability and mechanical properties of these nano-crystalline coatings are comparable to the bulk material - without any subsequent sintering step needed. This contribution gives an overview on the Aerosol Deposition Method. It shows existing applications and the state of knowledge of the film formation mechanism. Open issues and promising further developments conclude the presentation.