bei Google ScholarTitelangaben
Hohnloser, Daniel ; Shuklin, Dennis ; Schmidt, Carsten ; Kreitmaier, Michael ; Blasim, Mario ; Hagelauer, Amelie ; Weigel, Robert:
Feasibility Analysis of a Novel Production Method for Monolithic Integrated MEMS with Nanogaps.
In:
2016 IEEE SENSORS. -
Piscataway, NJ
: IEEE
,
2016
ISBN 978-1-4799-8287-5
DOI: https://doi.org/10.1109/ICSENS.2016.7808655
Abstract
This paper analyses a novel production technique for the fabrication of microelectromechanical system (MEMS) with a gap in the scale of nanometer. The technology is based on a density-changing layer, which let a gap arise through the shrinkage of this layer. After the description of the technology, the requirements for monolithic integration and CMOS compatibility with respect to this technology are worked out. It has been discovered that there are several challenges to be overcome, especially to find a material composition which match the requirements will be important as well as to set up the process without affecting other CMOS device parameters. But if these challenges are solved the process will be suitable for various applications and enable to open up new markets.
Weitere Angaben
| Publikationsform: | Aufsatz in einem Buch |
|---|---|
| Begutachteter Beitrag: | Ja |
| Keywords: | MEMS; NEMS |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften > Ehemalige Professoren > Lehrstuhl Kommunikationselektronik - Univ.-Prof. Dr.-Ing. Amélie Marietta Hagelauer Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Kommunikationselektronik Fakultäten > Fakultät für Ingenieurwissenschaften > Ehemalige Professoren |
| Titel an der UBT entstanden: | Nein |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 18 Okt 2019 10:45 |
| Letzte Änderung: | 17 Okt 2022 09:36 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/52523 |