at Google ScholarTitle data
Hohnloser, Daniel ; Shuklin, Dennis ; Schmidt, Carsten ; Kreitmaier, Michael ; Blasim, Mario ; Hagelauer, Amelie ; Weigel, Robert:
Feasibility Analysis of a Novel Production Method for Monolithic Integrated MEMS with Nanogaps.
In:
2016 IEEE SENSORS. -
Piscataway, NJ
: IEEE
,
2016
ISBN 978-1-4799-8287-5
DOI: https://doi.org/10.1109/ICSENS.2016.7808655
Abstract in another language
This paper analyses a novel production technique for the fabrication of microelectromechanical system (MEMS) with a gap in the scale of nanometer. The technology is based on a density-changing layer, which let a gap arise through the shrinkage of this layer. After the description of the technology, the requirements for monolithic integration and CMOS compatibility with respect to this technology are worked out. It has been discovered that there are several challenges to be overcome, especially to find a material composition which match the requirements will be important as well as to set up the process without affecting other CMOS device parameters. But if these challenges are solved the process will be suitable for various applications and enable to open up new markets.
Further data
| Item Type: | Article in a book |
|---|---|
| Refereed: | Yes |
| Keywords: | MEMS; NEMS |
| Institutions of the University: | Faculties > Faculty of Engineering Science > Former Professors > Chair Communication Electronics - Univ.-Prof. Dr.-Ing. Amélie Marietta Hagelauer Faculties Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Communication Electronics Faculties > Faculty of Engineering Science > Former Professors |
| Result of work at the UBT: | No |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 18 Oct 2019 10:45 |
| Last Modified: | 17 Oct 2022 09:36 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/52523 |