Impact Of High Sc Content On Crystal Morphology And RF Performance Of Sputtered Al1-xScxN SMR BAW

Titelangaben

Bogner, Andreas ; Timme, Hans-Jörg ; Bauder, Rüdiger ; Mutzbauer, Angelika ; Pichler, Diana ; Krenzer, Michael ; Reccius, Christian ; Weigel, Robert ; Hagelauer, Amelie:
Impact Of High Sc Content On Crystal Morphology And RF Performance Of Sputtered Al1-xScxN SMR BAW.
In: 2019 IEEE International Ultrasonics Symposium (IUS). - Piscataway, NJ , 2019 . - S. 706-709
ISBN 978-1-7281-4596-9
DOI: https://doi.org/10.1109/ULTSYM.2019.8925777

Volltext

Link zum Volltext (externe URL):

Abstract

Applications using BAW devices benefit from large intrinsic electromechanical coupling materials, e.g. Al 1-x Sc x N. This work reports BAW-SMRs using high piezoelectric Al 1-x Sc x N and investigates the relations between Sc content, crystal morphology and resonator RF performance. Finally, key requirements for high quality Al 1-x Sc x N thin-film growth are analyzed and discussed examplary for x = 20at.-%.