Enhanced Piezoelectric AL1−XSCXN RF-MEMS Resonators for Sub-6 GHz RF-Filter Applications : Design, Fabrication and Characterization

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Bogner, Andreas ; Bauder, Rüdiger ; Timme, Hans-Jörg ; Forster, Thomas ; Reccius, Christian ; Weigel, Robert ; Hagelauer, Amelie:
Enhanced Piezoelectric AL1−XSCXN RF-MEMS Resonators for Sub-6 GHz RF-Filter Applications : Design, Fabrication and Characterization.
In: MEMS 2020 : the 33rd IEEE International Conference on Micro Electro Mechanical Systems. - Piscataway, NJ , 2020 . - S. 1258-1261
ISBN 978-1-7281-3581-6
DOI: https://doi.org/10.1109/MEMS46641.2020.9056296

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Abstract

This paper reports the design, fabrication and characterization of bulk acoustic wave (BAW) resonators of the SMR-type (surface mounted resonator) with highly c-axis oriented Al 0.8 Sc 0.2 N thin-films. Various filter topologies have been demonstrated for high frequencies with sharp roll-off, wide bandwidth BW and low insertion loss IL (rel. 3dB-BW up to 9% and min. IL of 0.9 dB to 1.5 dB at 2350 to 2550 MHz). Furthermore, the challenges regarding the integration of Al 1-x Sc x N for n79 applications (4400 to 5000 MHz) are indicated. The demonstrations show promising results regarding acoustic-only filters at 5G frequencies.