at Google ScholarTitle data
Rettig, Frank ; Moos, Ralf:
Ceramic meso hot-plates for gas sensors.
In: Sensors and Actuators B: Chemical.
Vol. 103
(2004)
Issue 1-2
.
- pp. 91-97.
ISSN 0925-4005
DOI: https://doi.org/10.1016/j.snb.2004.04.040
Abstract in another language
A new type of gas sensor is presented that combines the advantages of micro machined silicon gas sensors and ceramic gas sensors. Low temperature co-fired ceramics (LTCC)-technology, which is the cutting edge for manufacturing high density integrable circuits for high frequency applications, is used to manufacture gas sensors. The sensor devices are shaped like already known hot-plate low-power micro machined silicon gas sensors. Compared to classical ceramic gas sensors the low thermal conductivity (3 W/mK) leads to a low power consumption (480 mW at 330 °C). The inexpensive manufacturing technology is a remarkable advantage for small series compared to the expensive silicon technology. This contribution presents first results for LTCC hot-plate gas sensors that include design, manufacturing, tests and simulation of such devices. Important thermal properties like power consumption and temperature distribution are measured and compared to FEM-simulations. The results of the simulations are used to improve the temperature distribution on the hot-plate. First measurements using a propane sensitive Cr2O3 layer show the principal operativeness of the concept using LTCC meso hot-plates for gas sensors.
Further data
| Item Type: | Article in a journal |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 02 Feb 2015 15:41 |
| Last Modified: | 05 Apr 2016 06:53 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/6156 |