Intrinsic compressive stress relaxation in ceramic films manufactured by powder aerosol deposition (PAD)

Title data

Paulus, Daniel ; Kita, Jaroslaw ; Moos, Ralf:
Intrinsic compressive stress relaxation in ceramic films manufactured by powder aerosol deposition (PAD).
2023
Event: 98. DKG-Jahrestagung , 27.03.-30.03.2023 , Jena.
(Conference item: Conference , Speech )

Project information

Abstract in another language

The powder aerosol deposition (PAD) is a novel method to manufacture dense ceramic coatings at room temperature. Films can be deposited on various kinds of surfaces like metals, ceramics, or plastics. This allows coating of low melting or thermally unstable materials that would not withstand the conventional coating processes. Coatings manufactured by PAD are nanocrystalline, dense and bear an intrinsic compression stress. The intrinsic compression stress can be relaxed by a heat treatment at comparatively low temperatures. The films are usually harder than the bulk material and a thickness range between 0.5 μm and 200 μm can be realized. Pure TiO2 and mixtures of TiO2 and MgO were deposited and the intrinsic stress in the films was determined in the as-deposited state and after heat treatment at different temperatures. The intrinsic stress in pure TiO2 already starts to decrease at 100 °C and is largely finished at 300 °C. The addition of MgO shifts this relaxation behavior by 50 °C to higher temperatures. Explanations based on the nanocrystalline structure for this behavior are discussed.