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Relaxation behavior of intrinsic compressive stress in powder aerosol co-deposited films : Rethinking PAD films as nanomaterials

Title data

Paulus, Daniel ; Kita, Jaroslaw ; Moos, Ralf:
Relaxation behavior of intrinsic compressive stress in powder aerosol co-deposited films : Rethinking PAD films as nanomaterials.
In: Ceramics International. Vol. 49 (2023) Issue 23, Part A . - pp. 38375-38381.
ISSN 1873-3956
DOI: https://doi.org/10.1016/j.ceramint.2023.09.065

Official URL: Volltext

Project information

Project title:
Project's official title
Project's id
Aerosolbasierte Kaltabscheidung: Co-Deposition von Funktionsmaterialien und Füllstoffen zur Substitution einer nachfolgenden Wärmebehandlung
MO-1060/37-1

Project financing: Deutsche Forschungsgemeinschaft

Abstract in another language

Pure TiO2 and TiO2/MgO co-deposited films were prepared by the powder aerosol deposition method (PAD). The extended Stoney's formula after Mézin was used to calculate the intrinsic compressive stress from the substrate deformation. Furthermore, crystallite size as well as microstrain were determined by X-ray diffraction and subsequent Rietveld refinement. The intrinsic stress in the TiO2 films already decreases at 100 °C and reaches a constant low level at 300 °C. The addition of MgO in the co-deposited film shifted this relaxation behavior by 50 °C to higher temperatures. Different possible explanations for this behavior are discussed, based on the microstructure and the nanocrystalline properties of the films.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Central research institutes > Bayreuth Center for Material Science and Engineering - BayMAT
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 17 Jan 2024 08:21
Last Modified: 17 Jan 2024 08:21
URI: https://eref.uni-bayreuth.de/id/eprint/88250