Relaxation behavior of intrinsic compressive stress in powder aerosol co-deposited films : Rethinking PAD films as nanomaterials

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Paulus, Daniel ; Kita, Jaroslaw ; Moos, Ralf:
Relaxation behavior of intrinsic compressive stress in powder aerosol co-deposited films : Rethinking PAD films as nanomaterials.
In: Ceramics International. Bd. 49 (2023) Heft 23, Part A . - S. 38375-38381.
ISSN 1873-3956
DOI: https://doi.org/10.1016/j.ceramint.2023.09.065

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Abstract

Pure TiO2 and TiO2/MgO co-deposited films were prepared by the powder aerosol deposition method (PAD). The extended Stoney's formula after Mézin was used to calculate the intrinsic compressive stress from the substrate deformation. Furthermore, crystallite size as well as microstrain were determined by X-ray diffraction and subsequent Rietveld refinement. The intrinsic stress in the TiO2 films already decreases at 100 °C and reaches a constant low level at 300 °C. The addition of MgO in the co-deposited film shifted this relaxation behavior by 50 °C to higher temperatures. Different possible explanations for this behavior are discussed, based on the microstructure and the nanocrystalline properties of the films.