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High-Temperature Miniaturized Furnace manufactured in HTCC-Technology

Title data

Kita, Jaroslaw ; Brandenburg, Annica ; Sudina, Irina ; Moos, Ralf:
High-Temperature Miniaturized Furnace manufactured in HTCC-Technology.
2014
Event: 38th International Microelectronics and Packaging IMAPS Conference , 21.-24.09.2014 , Rzeszów-Czarna, Poland.
(Conference item: Conference , Other Presentation type)

Abstract in another language

Results of investigations on 3D shaping of ceramic tapes are presented. One out of many possible applications of such structures is a miniaturized furnace for sintering of critical materials, which could contaminate expensive chamber furnaces, for tempering of single gas sensors, or for fast heating at controlled rate. While LTCC technology can be applied only up to 700 °C, application of HTCC tapes can extend temperature range to above 1000 °C. Therefore, 99.99% alumina tape (ESL 44007) was used. The here-shown miniaturized furnace has a hexagonal form. For a proper temperature distribution in the furnace chamber, the furnace was equipped with six platinum heaters that can be controlled independently. The whole structure has dimensions of 30 mm x 27 mm x 20 mm (W x H x D). The design process was supported by Finite Elements Analysis (FEM). After simulation, the miniaturized furnace was manufactured and successfully tested.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 11 May 2015 11:45
Last Modified: 15 Apr 2016 07:29
URI: https://eref.uni-bayreuth.de/id/eprint/13165