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Rettig, Frank ; Moos, Ralf:
Ceramic hot-plates for gas sensors.
2003
Veranstaltung: Eurosensors XVII
, 21.-24.09.2003
, Guimarães, Portugal.
(Veranstaltungsbeitrag: Kongress/Konferenz/Symposium/Tagung
,
Poster
)
Abstract
A new type of gas sensor is presented that combines the advantages of micro machined silicon gas sensors and ceramic gas sensors. LTCC-technology, which is the cutting edge for manufacturing high density integrable circuits for high frequency applications, is used to manufacture gas sensors. The sensor devices are shaped like already known hot-plate low-power micro machined silicon gas sensors. The low thermal conductivity (3 W/mK) leads to a low power consumption (0.63 W at 400 °C) compared to classical ceramic gas sensors. The inexpensive manufacturing technology is a remarkable advantage for small series compared to the expensive silicon technology. This contribution presents first results for LTCC hot-plate gas sensors that include design, preparation, tests and simulation of such devices. Important thermal properties like power consumption and temperature distribution are measured and compared to FEM-simulations. The results of the simulations are used to improve the temperature distribution on the hot-plate.
Weitere Angaben
| Publikationsform: | Veranstaltungsbeitrag (Poster) |
|---|---|
| Begutachteter Beitrag: | Ja |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien Profilfelder > Advanced Fields > Neue Materialien Forschungseinrichtungen > Forschungszentren > Bayreuther Materialzentrum - BayMAT Profilfelder Profilfelder > Advanced Fields Forschungseinrichtungen Forschungseinrichtungen > Forschungszentren |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 29 Jun 2015 12:01 |
| Letzte Änderung: | 05 Apr 2016 06:45 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/15433 |