at Google ScholarTitle data
Kita, Jaroslaw ; Gollner, Egmont ; Moos, Ralf:
Laser Processing of Materials for MCM-C Applications.
2008
Event: 2nd Electronic System-Integration Technology Conference : ESTC 2008
, 01.-04.09.2008
, London, Großbritannien.
(Conference item: Conference
,
Speech
)
Abstract in another language
Application of lasers for MCM-C (ceramic multichip modules) technology offers an opportunity to miniaturize passive elements as well as whole substrates. At present, the laser processed thick-film conductive lines can be as small as 20 mum. Processing of unfired LTCC tapes allows achieving hot-plate beams with widths of 250 mum. To realize such fine structures by laser cutting, some understanding of the nature of interaction of the laser beam with the material is necessary. Application of different laser types for microelectronic packaging was discussed earlier, e.g. in. In most cases however, Nd:YAG lasers were mainly applied for patterning PCBs, polymers, or silicon wafers, whereas for fired ceramics CO2-lasers were used. This paper discusses some phenomena that occur during processing of materials used in MCM-C applications: thick-film layers, fired and unfired ceramics with frequency-tripled Nd:YAG laser.
Further data
| Item Type: | Conference item (Speech) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 27 Apr 2015 13:55 |
| Last Modified: | 06 Apr 2016 09:18 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/11298 |