at Google ScholarTitle data
Kita, Jaroslaw ; Brandenburg, Annica ; Sudina, Irina ; Moos, Ralf:
High-Temperature Miniaturized Furnace manufactured in HTCC-Technology.
2014
Event: 38th International Microelectronics and Packaging IMAPS Conference
, 21.-24.09.2014
, Rzeszów-Czarna, Poland.
(Conference item: Conference
,
Other
Presentation type)
Abstract in another language
Results of investigations on 3D shaping of ceramic tapes are presented. One out of many possible applications of such structures is a miniaturized furnace for sintering of critical materials, which could contaminate expensive chamber furnaces, for tempering of single gas sensors, or for fast heating at controlled rate. While LTCC technology can be applied only up to 700 °C, application of HTCC tapes can extend temperature range to above 1000 °C. Therefore, 99.99% alumina tape (ESL 44007) was used. The here-shown miniaturized furnace has a hexagonal form. For a proper temperature distribution in the furnace chamber, the furnace was equipped with six platinum heaters that can be controlled independently. The whole structure has dimensions of 30 mm x 27 mm x 20 mm (W x H x D). The design process was supported by Finite Elements Analysis (FEM). After simulation, the miniaturized furnace was manufactured and successfully tested.
Further data
| Item Type: | Conference item (Other) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 11 May 2015 11:45 |
| Last Modified: | 15 Apr 2016 07:29 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/13165 |