at Google ScholarTitle data
Rettig, Frank ; Moos, Ralf:
Ceramic hot-plates for gas sensors.
2003
Event: Eurosensors XVII
, 21.-24.09.2003
, Guimarães, Portugal.
(Conference item: Conference
,
Poster
)
Abstract in another language
A new type of gas sensor is presented that combines the advantages of micro machined silicon gas sensors and ceramic gas sensors. LTCC-technology, which is the cutting edge for manufacturing high density integrable circuits for high frequency applications, is used to manufacture gas sensors. The sensor devices are shaped like already known hot-plate low-power micro machined silicon gas sensors. The low thermal conductivity (3 W/mK) leads to a low power consumption (0.63 W at 400 °C) compared to classical ceramic gas sensors. The inexpensive manufacturing technology is a remarkable advantage for small series compared to the expensive silicon technology. This contribution presents first results for LTCC hot-plate gas sensors that include design, preparation, tests and simulation of such devices. Important thermal properties like power consumption and temperature distribution are measured and compared to FEM-simulations. The results of the simulations are used to improve the temperature distribution on the hot-plate.
Further data
| Item Type: | Conference item (Poster) |
|---|---|
| Refereed: | Yes |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 29 Jun 2015 12:01 |
| Last Modified: | 05 Apr 2016 06:45 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/15433 |