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Ceramic hot-plates for gas sensors

Title data

Rettig, Frank ; Moos, Ralf:
Ceramic hot-plates for gas sensors.
Event: Eurosensors XVII , 21.-24.09.2003 , Guimarães, Portugal.
(Conference item: Conference , Poster )

Abstract in another language

A new type of gas sensor is presented that combines the advantages of micro machined silicon gas sensors and ceramic gas sensors. LTCC-technology, which is the cutting edge for manufacturing high density integrable circuits for high frequency applications, is used to manufacture gas sensors. The sensor devices are shaped like already known hot-plate low-power micro machined silicon gas sensors. The low thermal conductivity (3 W/mK) leads to a low power consumption (0.63 W at 400 °C) compared to classical ceramic gas sensors. The inexpensive manufacturing technology is a remarkable advantage for small series compared to the expensive silicon technology. This contribution presents first results for LTCC hot-plate gas sensors that include design, preparation, tests and simulation of such devices. Important thermal properties like power consumption and temperature distribution are measured and compared to FEM-simulations. The results of the simulations are used to improve the temperature distribution on the hot-plate.

Further data

Item Type: Conference item (Poster)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 29 Jun 2015 12:01
Last Modified: 05 Apr 2016 06:45