Verfahren zur Herstellung eines NTCR-Sensors

Titelangaben

Bruckner, Michaela ; Kita, Jaroslaw ; Moos, Ralf ; Münch, Christian ; Poulain, Veronique ; Schuurman, Sophie:
Verfahren zur Herstellung eines NTCR-Sensors.
EP000003406758A1 (2017)

Volltext

Link zum Volltext (externe URL):

Abstract

The present invention relates to a method of producing a negative temperature coefficient resistor (NTCR) sensor, the method comprising the steps of: providing a mixture comprising uncalcined powder and a carrier gas in an aerosol-producing unit, with the uncalcined powder comprising metal oxide components; forming an aerosol from said mixture and said carrier gas and accelerating said aerosol in a vacuum towards a substrate arranged in a deposition chamber; forming a film of the uncalcined powder of said mixture on said substrate; and transforming the film into a layer of spinel-based material by applying a heat treatment step.