Ion-Conducting Probes for Low Temperature Plasmas

Titelangaben

Meiss, Sebastian A. ; Rohnke, Marcus ; Rettig, Frank ; Moos, Ralf ; Janek, Jürgen:
Ion-Conducting Probes for Low Temperature Plasmas.
In: Contributions to Plasma Physics. Bd. 48 (2008) Heft 5-7 . - S. 473-479.
ISSN 1521-3986
DOI: https://doi.org/10.1002/ctpp.200810076

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Abstract

Probes interacting with a low temperature plasma are typically built of electron conducting materials, mostly metals. We apply yttria-stabilized zirconia (YSZ) which is oxygen ion conducting at elevated temperatures and which is a typical solid electrolyte with high ionic and negligible electronic conductivity. The processes at the plasma|YSZ interface are discussed and first results of measurements with ion-conducting single- and double-probes in oxygen containing radio frequency plasmas are presented.