Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors

Titelangaben

Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf ; Drüe, Karl-Heinz ; Thust, Heiko:
Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors.
In: Journal of Microelectronics and Electronic Packaging. Bd. 2 (2005) Heft 1 . - S. 14-18.
ISSN 1551-4897
DOI: https://doi.org/10.4071/1551-4897-2.1.14

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Abstract

Hot-plate LTCC gas sensors combine advantages of silicon structures (low power consumption) and typical ceramics gas sensors (stability and reliability). Such elements can be integrated in MEMS packages as well as in ceramic sensor arrays. Moreover, they can be produced in small series with relatively low cost. One important key in hot-plate design are properly formed beams. This paper presents possibilities and problems related to laser forming of LTCC ceramics for hot-plate gas sensors. Influence of beam width on power consumption and temperature distribution is discussed. Possibilities to achieve beam width as narrow as possible are practically tested by laser cutting. Obtained results are very promising for future work and for possible application of LTCC ceramics in such type of gas sensors.