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Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors

Title data

Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf ; Drüe, Karl-Heinz ; Thust, Heiko:
Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors.
In: Journal of Microelectronics and Electronic Packaging. Vol. 2 (2005) Issue 1 . - pp. 14-18.
ISSN 1551-4897
DOI: https://doi.org/10.4071/1551-4897-2.1.14

Official URL: Volltext

Abstract in another language

Hot-plate LTCC gas sensors combine advantages of silicon structures (low power consumption) and typical ceramics gas sensors (stability and reliability). Such elements can be integrated in MEMS packages as well as in ceramic sensor arrays. Moreover, they can be produced in small series with relatively low cost. One important key in hot-plate design are properly formed beams. This paper presents possibilities and problems related to laser forming of LTCC ceramics for hot-plate gas sensors. Influence of beam width on power consumption and temperature distribution is discussed. Possibilities to achieve beam width as narrow as possible are practically tested by laser cutting. Obtained results are very promising for future work and for possible application of LTCC ceramics in such type of gas sensors.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Faculties
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 02 Feb 2015 15:19
Last Modified: 08 Jul 2022 13:06
URI: https://eref.uni-bayreuth.de/id/eprint/6129