Title data
Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf ; Drüe, Karl-Heinz ; Thust, Heiko:
Laser forming of LTCC Ceramics for Hot-Plate Gas Sensors.
In: Journal of Microelectronics and Electronic Packaging.
Vol. 2
(2005)
Issue 1
.
- pp. 14-18.
ISSN 1551-4897
DOI: https://doi.org/10.4071/1551-4897-2.1.14
Abstract in another language
Hot-plate LTCC gas sensors combine advantages of silicon structures (low power consumption) and typical ceramics gas sensors (stability and reliability). Such elements can be integrated in MEMS packages as well as in ceramic sensor arrays. Moreover, they can be produced in small series with relatively low cost. One important key in hot-plate design are properly formed beams. This paper presents possibilities and problems related to laser forming of LTCC ceramics for hot-plate gas sensors. Influence of beam width on power consumption and temperature distribution is discussed. Possibilities to achieve beam width as narrow as possible are practically tested by laser cutting. Obtained results are very promising for future work and for possible application of LTCC ceramics in such type of gas sensors.
Further data
Item Type: | Article in a journal |
---|---|
Refereed: | Yes |
Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Faculties Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
Result of work at the UBT: | Yes |
DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
Date Deposited: | 02 Feb 2015 15:19 |
Last Modified: | 08 Jul 2022 13:06 |
URI: | https://eref.uni-bayreuth.de/id/eprint/6129 |