Influence of powder composition on the internal stresses and thermal annealing behavior of ceramic films formed by Powder Aerosol Co-Deposition

Titelangaben

Paulus, Daniel ; Kita, Jaroslaw ; Moos, Ralf:
Influence of powder composition on the internal stresses and thermal annealing behavior of ceramic films formed by Powder Aerosol Co-Deposition.
2022
Veranstaltung: Ceramics in Europe , 10.-14. July 2022 , Cracow, Poland.
(Veranstaltungsbeitrag: Kongress/Konferenz/Symposium/Tagung , Vortrag )

Angaben zu Projekten

Abstract

The Powder Aerosol Deposition (PAD) method is a novel method to produce ceramic films at room temperature. During the coating process, a ceramic powder forms an aerosol and is transferred to a vacuum deposition chamber. Particles are accelerated by a nozzle and subsequently impact on a substrate where a dense film is formed. PAD films typically bear a high internal compressive stress in the range between 0.5 GPa and 2.5 GPa as an intrinsic feature. Firstly, this stress may lead to a film delamination in case of high film thicknesses, if the interface of film and substrate cannot withstand the occurring shear stress. Secondly, film stresses cause a significant deterioration of electric properties like the electronic or ionic conductivity. Thermal annealing diminishes the internal stress and regains high electrical properties, yet this treatment opposes to the advantage of PAD of ceramic room temperature processing. In this work, the internal stress of PAD films consistent of different materials and their mixtures was determined. Furthermore, the mechanical annealing behavior was studied by XRD and substrate curvature measurements after thermal treatments. The results show different internal stresses depending on the powder composition.